The development of lithographic technologies was discussed at a meeting of the Scientific Council of ONIT RAS with the participation of a resident of the Technopolis Moscow SEZ.

Representatives of the Technopolis Moscow Special Economic Zone (hereinafter referred to as the SEZ) systematically participate in the discussion of fundamental issues of the development of information, computing and control systems. This activity is carried out within the framework of cooperation with the Department of Nanotechnology and Information Technology of the Russian Academy of Sciences (hereinafter — ONIT RAS). One of the relevant areas considered at the site of the Scientific Council of ONIT RAS is the development of lithographic technologies, a key element of the production chain in the microelectronic industry. At the next meeting of the Scientific Council of ONIT RAS, the current state and prospects for the development of lithography were identified as one of the main topics on the agenda. The report was made by: Anatoly Kovalev is the General Director of ZNTC LLC, which is a resident of Technopolis Moscow SEZ. In his speech, the speaker provided up-to-date information on scientific and technical solutions implemented by the company as part of the localization of lithographic stepper production, as well as outlined the company's strategic plans. During the report, the following priority areas of activity of the resident enterprise were identified: - creation of a full cycle of photolithography without the use of imported equipment. This measure is aimed at ensuring technological independence in the field of microelectronics.; - reduction of cost and technical risks in the production process of microchips. The implementation of this direction will increase the economic efficiency of the production of microelectronic products.; - scaling of equipment to topological standards of 130/90 nm. Achieving these standards is an intermediate stage on the way to mastering more subtle technological processes. The participation of the General Director of the Technopolis Moscow SEZ resident enterprise in the meeting of the Scientific Council of ONIT RAS confirms the following facts: - advanced technologies in the field of microelectronics are being formed and developed on the territory of the SEZ; - SEZ residents are integrated into the system of scientific and technical expertise at the level of the Russian Academy of Sciences; - Technopolis Moscow SEZ acts as a platform for localization of critical industries of strategic importance to the industry. Technopolis Moscow SEZ continues its systematic work to attract high-tech industries and ensure their interaction with relevant scientific organizations. The participation of residents in the meetings of the Scientific Council of ONIT RAS helps accelerate the introduction of innovations and enhance the technological sovereignty of the Russian Federation in the field of microelectronics.