A resident of SEZ "Technopolis Moscow" is testing the first Russian 90 nm photoresist

Technopolis Moscow Resident Tests Russia’s First 90nm Photoresist
Mikron, a resident of the Technopolis Moscow Special Economic Zone (SEZ), has begun testing Russia’s first domestically developed photoresist for the production of microchips using the 90-nanometer process. The introduction of this material will allow the plant to reduce reliance on foreign analogues. In the medium term, Mikron aims to fully transition to a Russian component base in the field of ultra-pure and advanced materials. The first domestic photoresist was developed by NIIME, another SEZ resident. The news was announced by Maxim Liksutov, Moscow Deputy Mayor for Transport and Industrial Policy.

More than 60 Moscow-based enterprises operate in the fields of microelectronics and photonics, with about 40 of them being SEZ residents. These companies are actively engaged in import substitution, producing microchips, optoelectronic devices, smart cards, RFID products, and other high-tech goods. Large-scale city support enables them to invest heavily in new developments and production facilities.

“Since its inception, the Moscow SEZ has provided residents with a wide range of tax benefits, enabling microelectronics manufacturers to invest more than 75 billion rubles into their development. This has resulted in the production of over 174 billion rubles worth of high-tech goods. Many enterprises are now integrating domestic electronic components of a new technological level, which will play a decisive role in the industry’s future. One of the SEZ’s leading residents, Mikron, is successfully testing the first Russian-made photoresist for photolithographic processes at 90nm. This represents a true breakthrough for the sector,” said Liksutov.

Photoresist, a light-sensitive polymer material, is a key element in microchip production using photolithography. It is applied to a silicon wafer and exposed to light through a special mask, forming a relief “pattern” of the chip. Until recently, Russia lacked domestic photoresist production due to the absence of its own photolithography equipment. Today, Mikron remains the only Russian manufacturer producing microchips with 180–90nm topologies. Its chips are used in NSPK Mir payment cards, passports, driver’s licenses, the Troika transport card, and the Moskvenok school card. The company holds about 80 active patents and certificates for state-registered products. It has already implemented 16 ultra-pure chemicals and 25 specialized electronic gases of domestic origin in production, with another 23 materials under development, according to Anatoly Garbuzov, Moscow Government Minister and Head of the Department of Investment and Industrial Policy.

The 90nm photoresist was developed by NIIME (Research Institute of Molecular Electronics) with the support of the Russian Ministry of Industry and Trade. According to NIIME CEO Alexander Kravtsov, the institute and its partners have successfully developed, tested, and validated Russia’s first fully domestic photoresist for the 90nm process, which meets all the necessary requirements to compete with foreign counterparts. NIIME has already created seven specialized materials, with another ten in development and three new projects underway.

“Import substitution in microelectronics materials must be carried out in close cooperation with research institutions so that innovations can be immediately transferred to production. The development of a domestic 90nm photoresist marks a major milestone both for Mikron — which is conducting a globally unprecedented transition to domestic materials in an active production cycle — and for the entire industry,” emphasized Gulnara Khasyanova, CEO of Mikron.

The Technopolis Moscow SEZ has also overseen the development of the first Russian photolithography machine for the 350nm process.

“Such cutting-edge innovations have become possible thanks in part to the strong support provided by the Moscow SEZ. Since its establishment, residents have saved over 14.8 billion rubles in taxes, while investing 215 billion rubles into their production development,” added Gennady Dyogtev, CEO of the Technopolis Moscow SEZ.